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FACILITIES

Thin film deposition: Plasma-enhanced chemical vapor deposition (PECVD), Low-pressure chemical vapor deposition (LPCVD), Electron-beam and thermal evaporation, Radio frequency (RF) and dc sputtering.

High-temperature processing: Four-stack furnace systems for thermal diffusion (phosphorous, boron), oxidation, annealing, sintering, Rapid thermal processing (RTP), Infrared (IR) belt furnace processing.

Photolithography and etching: Mask aligner, photoresist processing and developing station in class-1000 yellow room, reactive ion etching, wet-chemical etching.

Nanomaterials processing: Specialized glove-boxes and fumehoods for chemical synthesis of quantum dots, Hydrothermal autoclave for nanowire growth, Tools for layer embedment of quantum dots and graphene nanoparticles, Dip-coating system, Centrifuge, titrator, and high-speed shaker.

Materials characterization: Steady-state and lifetime fluorimeter photoluminescence (PL) system with quantum yield, cryostat, and fluorescence microscope, Scanning electron microscope (SEM), Surface profilometry, Microwave photoconductivity decay (u-PCD) measurement, Laser beam induced current (LBIC), Spectroscopic ellipsometry, Fourier transient infrared spectroscopy (FTIR), UV/visible infrared spectrophotometry, Hall effect, Four-point probe.

Device fabrication: Complete fabrication platforms for solar cells (wafer-based, thin film, and nano-enabled), Transistors for display backplanes, Tools for quantum-dot color patterning for pixel displays, Circuit components and implementation.

Device characterization Lab: Probe station, I-V parametric analyzer, Solar simulator, Quantum efficiency measurement, Integrated sphere reflection, High-frequency and quasi-static capacitance-voltage (C-V), Deep-level transient spectroscopy (DLTS).

PV module lamination lab: Laminators for mini-PV modules (60cmx60cm and 15cmx15cm), Quantum-dot embedment for smart glass/laminate structures and implementation.

Design and simulation: Simulation and design tools for high efficiency PV device architectures including nanostructures, circuit-schemes for intelligent power-conditioning, simulation platforms for hybrid systems with energy management.

 

 

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University of Waterloo
200 University Avenue West
Waterloo, Ontario N2L 3G1
Canada